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Etching 15nm features using a hot probe and organic glass
Scientists may have a new level of control over the resolution and depth of the details they can etch on surfaces, according to a paper published in Science this week. A group of researchers from various IBM campuses have found a way to use a glassy resist material with a heated probe that can pattern objects with 15-nanometer sized impression "pixels" that don't distort the surrounding area, a ...
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